ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Solid-phase reactions of copper films with underlying gadolinium, erbium, and erbium–silicide layers on Si(100) substrates were investigated. For the phase analysis, x-ray diffraction and cross-sectional transmission electron microscopy were used. In the case of Cu/Gd/Si(100), an orthorhombic GdSi2 formed, and, at higher temperatures, copper aggregated into islands. Annealed Cu/Er/Si(100) samples resulted in a hexagonal Er5Si3 phase. In the Cu/ErSi2−x/Si system, the copper catalyzes the transformation of the highly oriented hexagonal ErSi2−x phase into hexagonal Er5Si3. Diverse phase developments of the samples with Gd and Er are based on reactivity differences of the two rare-earth metals. © 2001 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1378054
