Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
58 (1985), S. 4360-4364
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The optical properties of thin films of poly(butene-1-sulfone), PBS, an electron beam resist, are presented for the range of photon energies from 2.5 to 39.0 eV. The density of these films is found to be (1.39 ± 0.02) g cm−3. A sum-rule calculation is used to demonstrate the overall consistency of the data obtained. The optical data are used to calculate inelastic electron mean-free paths in PBS as a function of incident electron energy from 100 to 10 000 eV.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.335525
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