ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The characteristics of argon electron cyclotron resonance plasma discharged by 7.0, 8.0, and 9.4 GHz microwaves were investigated. Experiments were conducted in a fixed magnetic field. It was found that the electron temperatures Te exhibited a trend of Te7.0〈Te8.0〈Te9.4 (suffixes represent the discharge microwave frequencies). © 2001 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1347972