ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A rectilinearly wide plasma has been formed by electron cyclotron resonance (ECR). The ECR magnetic field is generated in the long range using a pair of 300-mm length magnets with oppositely facing poles. Microwave of 2.45-GHz frequency is supplied through a quartz window from a slotted waveguide placed between the magnets. A preliminary experiment is conducted to acquire basic data for sputtering targets to fabricate wide, uniform thin films. It is established by simulation that sputtering directivity obeys the square-root cosine law. Two planar titanium targets are lined up in parallel with the slotted waveguide. They are so tapered as to point their edges at each other and soaked in the uniform plasma. Uniform films are formed within an area of 180×180 mm2 in a 200-mm width plasma by sputtering the tapered targets and varying the direction of substrate surface to the targets. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148591
