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A novel bimorph-type actuator for use in scanning probe microscopes (1993)

Hammiche, A. ; Webb, R. P. ; Wilson, I. H.

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 64 (1993), S. 3332-3333

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: We describe a novel bimorph-type piezoelectric transducer which achieves three-dimensional positioning in a 70 μm ×70 μm ×10 μm volume with applied voltage ranges less than 100 V. This transducer, appropriately shaped and with appropriately patterned electrodes, has been tested by using it as a scanner in a scanning tunneling microscope. Results obtained in this application of the actuator are presented, including characterization of performance.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1144301

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