ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
This paper develops a new separated mini-environment to provide a constant temperaturechamber for the placement of Micro/Nano-metrology instrument. In this paper, the rule oftemperature change with time under natural convection and coercive convection is presented. Themeasurement and control system is composed of TEC, programmable power source and precisetemperature measurement system. The mathematic model of the constant temperature chamber isidentified making use of system identification theory and system identification toolkit of MATLAB.The temperature stability is improved by applying auto-adaptive PID method. Experiments showthat the temperature fluctuation of a single-point is less than 0.02°C and the whole field is within0.05°C. The goal of high-precision temperature control is achieved
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.65.pdf
