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Two-Dimensional Adaptive Simulation of Dopant Diffusion in Silicon (2000)

Lang, Jens ; Merz, Wilhelm

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Publikationsdatum: 2014-02-26

Beschreibung: One important step in the fabrication of silicon-based integrated circuits is the creation of semiconducting areas by diffusion of dopant impurities into silicon. Complex models have been developed to investigate the redistribution of dopants and point defects. In general, numerical analysis of the resulting PDEs is the central tool to assess the modelling process. We present an adaptive approach which is able to judge the quality of the numerical approximation and which provides an automatic mesh improvement. Using linearly implicit methods in time and multilevel finite elements in space, we are able to integrate efficiently the arising reaction-drift-diffusion equations with high accuracy. Two different diffusion processes of practical interest are simulated.

Schlagwort(e): ddc:000

Sprache: Englisch

Materialart: reportzib , doc-type:preprint

Format: application/postscript

Format: application/pdf

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