Digitale Medien
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
79 (1996), S. 8841-8843
ISSN:
1089-7550
Quelle:
AIP Digital Archive
Thema:
Physik
Notizen:
A defect state, defect B, was found in Ta2O5 after postdeposition annealing in O2 by a novel zero-bias thermally stimulated current spectroscopy technique. The activation energy ET was estimated to be about 0.3 eV. Evidence is given that defect B is a hole trap. We believe that defect B is an acceptor level in Ta2O5 due to Si substituting for Ta. The presence of Si contamination in Ta2O5 due to diffusion of Si from the Si substrate into Ta2O5 was confirmed by secondary-ion-mass spectrometry. © 1996 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.362510
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