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Digitale Medien

Application of reflectance studies to layered samples: SiOx on InSb (1988)

Remond, G. ; Holloway, P. H. ; Caye, R. ; [weitere]

Chichester [u.a.] : Wiley-Blackwell

Surface and Interface Analysis 11 (1988), S. 134-143

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Details

ISSN: 0142-2421

Schlagwort(e): Chemistry ; Polymer and Materials Science

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Physik

Notizen: Spatially resolved optical micro-reflectometry in the visible region (from 400 nm to 800 nm) is used to study InSb substrates covered with SiOx (1 〈 x 〈 2) films of known thicknesses. Using optical constants (refractive index and extinction coefficient) for uncoated InSb derived from two successive reflectance measurements carried out in air and oil, a model of absorbing films on an absorbing substrate was used to calculate the reflectance. Comparison of measured and calculated reflectances for SiO2 films over InSb demonstrate the validity of the model for an absorbing substrate covered with a homogeneous layer. Optical constants for the SiOx layers are obtained from comparisons between experimental and calculated reflectance curves.

Zusätzliches Material: 12 Ill.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1002/sia.740110303

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