ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
In order to relate an Auger signal to the atomic concentration in the surface of a solid, it is well known that corrections have to be made for matrix effects. Also, corrections may be needed to compensate for the effects of artefacts caused by properties of the sample other than the concentration of different elements. Large artefacts can be caused by the surface topography and subsurface composition variations often present in ‘real’ samples. This paper reports a new correction scheme that enables the quantitative analysis of samples with a structure for which no prior knowledge exists. The scheme uses the ratio of the Auger peak height to a background count rate above the energy of all significant Auger features, combined with a linear correction invoving the atomic number of the substrate and the Auger backscattering factor. Inhomogeneous samples with angle of incidence variations from 0° to 45° and an arbitrary atomic number can be analysed with an accuracy of ∼5 at.% using this method. Limitations exist for thin unsupported films.
Additional Material:
3 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740211207
