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Digitale Medien

UNCONVENTIONAL NANOFABRICATION (2004)

Gates, Byron D. ; Xu, Qiaobing ; Love, J. Christopher ; [weitere]

Palo Alto, Calif. : Annual Reviews

Annual Review of Materials Research 34 (2004), S. 339-372

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Details

ISSN: 1531-7331

Quelle: Annual Reviews Electronic Back Volume Collection 1932-2001ff

Thema: Maschinenbau

Notizen: Nanostructures are fabricated using either conventional or unconventional tools-that is, by techniques that are highly developed and widely used or by techniques that are relatively new and still being developed. This chapter reviews techniques of unconventional nanofabrication, and focuses on experimentally simple and inexpensive approaches to pattern features with dimensions 〈100 nm. The techniques discussed include soft lithography, scanning probe lithography, and edge lithography. The chapter includes recent advances in fabricating nanostructures using each set of techniques, together with demonstrated advantages, limitations, and applications for each.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1146/annurev.matsci.34.052803.091100

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