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Digitale Medien

Fabrication of LIGA mold inserts (1998)

Bacher, W. ; Bade, K. ; Matthis, B. ; [weitere]

Springer

Microsystem technologies 4 (1998), S. 117-119

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Details

ISSN: 1432-1858

Quelle: Springer Online Journal Archives 1860-2000

Thema: Elektrotechnik, Elektronik, Nachrichtentechnik , Technik allgemein

Notizen: Abstract The present paper describes the fabrication sequence of a LIGA mold insert by electroforming after the patterning steps of the overall process. These tools are applied for large scale fabrication of microcomponents made by molding and embossing processes. The application of an intermediate layer system leads to optimized process performance and to a better surface quality of the mold insert. The plating processes are described and the materials properties, e.g. hardness, are used for the characterization of the recrystallization behavior of the electroformed nickel which yields the high temperature application limit of the tool.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1007/s005420050110

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