Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
81 (2002), S. 987-989
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The results of investigations using pulsed, electron-beam-produced plasmas in Ar/SF6 mixtures are reported. Time-resolved, positive, and negative ion fluxes were measured at a biased electrode located adjacent to the plasma. The measurements indicate that plasmas form with large negative ion densities due to electron attachment to SF6 at the low electron temperatures associated with electron-beam-generated plasmas. © 2002 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1498502
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