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Digitale Medien

Optical properties of gallium oxide thin films (2002)

Rebien, M. ; Henrion, W.

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 81 (2002), S. 250-252

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Details

ISSN: 1077-3118

Quelle: AIP Digital Archive

Thema: Physik

Notizen: The optical functions of β-Ga2O3 thin films have been determined by ellipsometry from 0.74–5 eV. Several electron-beam evaporated and rf magnetron sputtered films of different thicknesses were investigated using a multisample technique. Refractive index values comparable to those of bulk material are found. Cauchy dispersion model fits yield a high-frequency dielectric constant ε∞ of 3.57. Above 4.7 eV a direct absorption edge is observed. © 2002 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.1491613

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