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Digitale Medien

Spatially resolved electron temperature measurements with a microfabricated retarding field analyzer (2002)

Sowa, M. J. ; Blain, M. G. ; Jarecki, R. L. ; [weitere]

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 80 (2002), S. 932-934

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Details

ISSN: 1077-3118

Quelle: AIP Digital Archive

Thema: Physik

Notizen: Electron temperature (Te) is an important parameter to quantify in the high-density plasmas commonly used in semiconductor manufacturing. Te is characteristic of the electron energy distribution which determines the plasma density and distribution of neutral and ionic species. Through application of theoretical considerations for the presheath and sheath, Te can be estimated from the ion energy distribution to a floating substrate. Utilizing microfabricated retarding field analyzers (RFAs) to measure the local ion energy distribution to a floating surface, spatially resolved Te measurements in an inductively coupled argon plasma have been made. Quantitative agreement between the RFA and Langmuir probe Te measurements was observed and the RFA Te measurements display the expected power, pressure, and spatial dependencies. © 2002 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.1448170

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