Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
67 (1995), S. 894-896
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
It is shown that for a cathode consisting of compressed graphite powder, the cathodic arc discharge is confined within deep erosion holes and the macroparticle emission is greatly reduced. Electron energy loss spectroscopy and scanning electron microscopy show that smooth tetrahedral amorphous carbon films with up to 85±10% sp3 bonding can be deposited without the use of magnetic filters. The new carbon arc discharge process holds potential for deposition of smooth tetrahedral amorphous carbon films on large area substrates due to the elimination of the magnetic filtering stage. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.114728
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