ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Nitrogen-containing carbon films where deposited by reactive ion plating under a pure nitrogen ambient. Knoop hardness, microindentation hardness, and microscratch hardness of these films were evaluated. Indentation hardness, such as Knoop hardness and microindentation hardness, is influenced by surface roughness and substrate hardness, so the effect of nitrogen inclusion on the hardness cannot be clearly evaluated. In contrast, an atomic force microscope can clearly evaluate the effect of nitrogen inclusion on scratched wear depth. © 1994 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.112414