Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
87 (2000), S. 2840-2848
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Metal-free amorphous hydrocarbon (a-C:H) and Ti-containing hydrocarbon (Ti–C:H) coatings have been synthesized in a hybrid chemical vapor deposition (CVD)/physical vapor deposition (PVD) system which combines inductively coupled plasma (ICP) and sputter deposition. a-C:H coatings have been fabricated by ICP assisted CVD in inert/hydrocarbon gas mixtures while Ti–C:H coatings have been fabricated by ICP assisted magnetron sputtering of Ti in inert/hydrocarbon gas mixtures. We present results of structural characterization and mechanical property measurements on these a-C:H and Ti–C:H coatings. In particular, the influence of hydrogen on the coating mechanical properties is probed experimentally. We show that hydrogen significantly influences the mechanical properties of a-C:H and Ti–C:H coatings and needs to be considered for a full understanding of the mechanical properties of Ti–C:H coatings. Our results demonstrate that combining ICP with sputter deposition makes a versatile CVD/PVD tool capable of depositing metal-free and metal-containing hydrocarbon coatings with widely varying microstructures and mechanical properties. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.372266
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