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Experimental setup and electrical characteristics of an inductively coupled plasma (1999)

Godyak, V. A. ; Piejak, R. B. ; Alexandrovich, B. M.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 85 (1999), S. 703-712

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: This article describes an experimental system that has been used to study inductively coupled plasma (ICP). The aim of this effort was to generate an experimental ICP database over a wide range of discharge conditions (power, frequency, and gas pressure) obtained in the same experimental device and using the same diagnostic means. Design of the experimental setup and diagnostics for measurement of ICP external electrical characteristics (coil voltage and current), power dissipated in plasma and radio frequency plasma potential are given here together with experimental results obtained over a wide range of discharge conditions. © 1999 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.369150

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