ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Time- and space-resolved emission and laser-induced fluorescence spectroscopic measurements were performed to investigate vaporization and plasma formation resulting from excimer laser irradiation of titanium targets in a low-pressure nitrogen atmosphere. Measurement series have been done by varying the laser intensity from the vaporization threshold at 25 MW cm−2 up to values of about 500 MW cm−2 typically applied in pulsed laser deposition processing of titanium nitride films. Thus, the transition from thermal evaporation to the high-density plasma formation process, leading to the production of reactive species and high-energy ions, was evidenced. An interesting result for the comprehension of the reactive deposition process was the observation of a quantity of dissociated and ionized nitrogen, which is transported with the plasma front in the direction of the substrate. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.358708
