ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The interaction of dislocations with light elements like oxygen and carbon presents a variety of aspects which are of basic interest for the understanding of gettering processes, as well as for a deeper knowledge of the electrical and optical properties of dislocations. We report the results of a systematic investigation of the influence of the dislocations on the segregation of oxygen and of the effect of oxygen segregation on their electrical activities. The experiments were carried out on p-type Czochralski silicon, in the 700–1100 °C temperature range. It has been shown that not only a direct oxygen-dislocation interaction occurs, but also that a competition between homogeneous and heterogeneous segregation processes occurs, which influences the overall electrical properties of the samples as well.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.357573
