Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
75 (1994), S. 3681-3683
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We studied the effect of threading dislocation scattering on the mobility of a two-dimensional electron gas. To verify our theory, we grew Si-doped AlGaAs/GaAs selectively doped heterostructures with different dislocation densities by changing the number of thermal annealing cycles. The theory agreed well with our experimental results. Previous work on high electron mobility transistors (HEMTs) fabricated on Si indicated that the device characteristics are insensitive to the dislocation density. Our theory states that the room temperature mobility reduction by dislocations with a density below 108 cm−3 does not affect HEMT device performance, which is consistent with empirically known results.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.356085
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