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Digitale Medien

Textures of Ta/Al multilayer films (1993)

Yuan, X. Y. ; Wu, Z. Q. ; Hu, A. ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 73 (1993), S. 3827-3829

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Details

ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: Ta/Al multilayer films with a modulation wavelength of 7.0 nm were grown using magnetron sputtering. The Bragg θ-2θ scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and A1(111) axial textures with a mosaic spread of about ±5° and coherency strains. The structure change of the multilayer sample after annealing at 550 °C for 2 h is determined by the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202)+(002)] textures.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.352890

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