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Optical spectra of SixGe1−x alloys (1989)

Humlícek, J. ; Garriga, M. ; Alonso, M. I. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 65 (1989), S. 2827-2832

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: We report pseudodielectric functions of SixGe1−x alloys at room temperature, measured ellipsometrically on polycrystalline samples and single-crystal epitaxial layers, in the 1.7–5.6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layered structures.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.342720

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