ISSN:
1089-7674
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The radial structure of a steady-state surface-wave-sustained cylindrical argon plasma submitted to a static, axial magnetic field is described in the context of a hydrodynamic model using three-moment equations for electrons and two-moment equations for ions. This plasma model is coupled self-consistently to Maxwell's equations and yields the radial profile of the electron density and temperature, as well as the radial distribution of excited species, in the 3p56d orbital configuration of argon. In this paper, the discussion focuses on the radial structure of the plasma as a function of the operating conditions (magnetic field intensity, gas pressure, wave frequency, plasma tube radius). It is found that the electron density profile is, generally, weakly modified, as these parameters are changed. In contrast, the electron temperature profile and, consequently, the excited atom density distribution are very sensitive functions of the operating conditions. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.871694
