ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Regarding x-ray mirror design and fabrication, the unique properties of the ESRF source push specifications far beyond the obtainable limits of current technology. In order to keep control of the high quality of optical beamline components, interferometric based metrology capabilities are mandatory. This paper describes the ESRF metrology facility in which four complementary systems permit complete analysis of the quality of x-ray optical components. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1146506