Digitale Medien
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
61 (1990), S. 3460-3463
ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
A simple, gas-fed, radio-frequency-driven plasma source is described. By use of lower hybrid waves, noble gas plasmas were produced with electron densities up to 1012 cm−3 over a range of magnetic fields from 400 G to 1.5 kG and rf frequencies from 2–220 MHz.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1141603
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