ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
An ion source using electron impact ionization is described and tested using phosphorus. An electron beam (600 eV, 10 mA) crosses a neutral flow of phosphorus vapor in the ionization chamber. The ions are extracted by multiaperture electrodes and a 800-μA ionic current can be obtained. Emittance diagrams of the source are drawn which lead to the value of ε4=4.8×10−7 rad2 m2.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1138822