Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
56 (1985), S. 2088-2091
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We describe techniques for constructing single-crystal silicon high-Q torsional oscillators. The oscillators are fabricated by the high-precision micromachining of silicon using orientation-dependent etches. We describe methods for using these oscillators as very powerful probes of the mechanical properties of a variety of physical systems.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1138425
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