ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Piezoelectric servo mechanism, with its existing nonlinear response and hysteresis,restricts the precision greatly when applied to manufacturing of non-axisymmetric optic mirror. On the basis of theory analysis and experiments, this paper builds three kinds of feed-forward model of piezoelectric servo cutting system. According to these mathematical models, we make the compensation control to the cutting tool position, which results the maximum displacement error less than 0.04μm. And based on this method, experiments on machining non-axisymmetric opticsurface of wave front corrector shows the Zernike relative error is less than 10%. So the compensation control of feed-forward control model of cutting tools position can efficiently counteract the influence of nonlinear response and hysteresis, which improves machining precision of non-axisymmetric optic mirror surface
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/11/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.505-507.181.pdf
