ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Recently, the micro-column has been intensively studied as a potential candidate fornext-generation lithography with high-throughput capability. The micro-column has a simplestructure with an electron emitter, micro-lenses, a double octupole deflector, and an Einzel lens. Thestructure and performance of the micro-column are dependent on the characteristics of the electronemitter. The electron emitter should have several prerequisites such as stable emission of electrons,high brightness and long lifetime. It is also necessary for the emitted electrons to have sufficiently lowkinetic energy, which can be achieved by using a very sharp emission tip. In this work, we made anextremely sharp tip by electro-chemically etching the tungsten wire in 10 % KOH solution. From theFowler-Nordheim plot, the effective radius of the tip was found to be as small as ~12 nm, which isconsistent with the value measured by SEM. We also discovered that the stability of emission can beenhanced very much through thermal treatment of the tip end by irradiating the Nd:YAG laser pulse
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/15/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.544-545.829.pdf
