ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The alignment precision of the electron lenses is one of the most critical factors thatdetermine overall performance of the microcolumn system including the image resolution andaberration. Since the lens apertures are usually as small as 5 ~ 300 μm, the alignment is difficult tocarry out, even if the expensive and complicated aligner is used. In this work, we have developed anovel alignment method using laser diffraction pattern, with which we can easily obtainhigh-precision alignment. The images of Cu grid (mesh# 1000) and carbon nanotubes (200-nmdiameter) taken by the microcolumn fabricated by the new alignment scheme has confirmed that thenew method was very simple and useful
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/15/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.544-545.845.pdf