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  • 1
    Electronic Resource
    Electronic Resource
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 326-328 (Dec. 2006), p. 215-218 
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: We tried to apply the nanoindentation technique to yield strength characterization bymodifying a previous research. Although the yield strength determining technique developed byKramer et al. has been successfully demonstrated for large scale indentations on bulky metals, itsapplicability is still doubtful to nanoscale indentations on thin films with severe roughness,anisotropy, and interfacial constraint. In order to overcome these problems, we combined thenanoindentation technique with a three-dimensional indent visualization technique in this study.Nanoindentation tests were performed for Au and TiN thin films and their corresponding indentswere scanned by using an atomic force microscope. From the three-dimensional pile-upmorphology, a circular pile-up boundary was measured and input into the yield strength formulationas an effective yielded zone radius. The yield strengths calculated were directly compared withthose from the microtensile test
    Type of Medium: Electronic Resource
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