Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Solid state phenomena
Vol. 121-123 (Mar. 2007), p. 1207-1210
ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
In situ UV-LIGA assembled robust micro check valves with large flow rates (〉10ml/s, displacement related), high-pressure support ability (〉10 MPa) and highoperational frequencies (〉10 kHz) made of nano-structured nickel were presented inthis paper. The microvalve consists of an array of 80 single micro valves to achieve therequired flow rates. Test results show that the forward flow rate is about 19 ml/s underpressure of 90Psi. The backward flow rate is negligible. The reliability of the valve isensured by the valve design and nanostructured nickel realized. The tested tensilestrength of a nano structured nickel is about 1GPa. The strength of SU-8 is 50MPa,which is more than 50% higher that fabricated with a standard process
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.121-123.1207.pdf
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