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  • 1
    Electronic Resource
    Electronic Resource
    s.l. ; Stafa-Zurich, Switzerland
    Advances in science and technology Vol. 45 (Oct. 2006), p. 1218-1223 
    ISSN: 1662-0356
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Natural Sciences in General , Technology
    Notes: Coating of austentic stainless steel substrates with Ti/O compositionally gradient film wasexamined using reactive DC sputtering technique, in order to improve not only the abrasionresistance of the stainless steel but also the adhesion between the deposited film and the substratewith preserving the high hardness of such a hard ceramic coating as titanium oxide coating. Thedeposition of Ti/O compositional gradient films were realized by varying continuously the oxygencontent in Ar-O2 sputter-gas during the reactive sputtering. The obtained films were appeared to beuniform and adhesive, while Ti-O compositional constant (i.e. non-gradient) films which weredeposited by reactive DC sputtering under the same sputtering conditions except for the Ar-O2 gasmixing condition, i.e., with the oxygen content in the gas mixture constant, peeled off partly.According to AES in-depth profiles, the oxygen (O) concentration in the obtained film graduallydecreased in depth direction from the surface toward the substrate, confirming that Ti/Ocompositional films had formed on the stainless steel. On the basis of XRD, it was found that not onlyhcp alpha-titanium and titanium oxide (anatase) but also some types of suboxides had formed in thegradient films. Furthermore the gradient films approximately indicated Hv600 which was muchhigher than that of the stainless steel substrate. Therefore the abrasion resistance of the stainless steeland the adhesion at the interface were expected to be improved at the same time
    Type of Medium: Electronic Resource
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