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  • 1990-1994  (3)
  • 1994  (1)
  • 1992  (2)
Materialart
Erscheinungszeitraum
  • 1990-1994  (3)
Jahr
  • 1994  (1)
  • 1992  (2)
  • 1
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 3757-3762 
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: By using conformal transformation to take account of the boundary effect, it has been confirmed that there are some areas of a square sample near the corners besides the boundary suitable to the resistance measurement of Van der Pauw's method. The theoretical criterion of the suitability is whether Van der Pauw's formula for calculation of the sheet resistance is still valid provided the voltage values in the formula for two times the measurement are substituted with those obtained by using the theory of conformal transformation. The experimental criterion is whether the experimental values of sheet resistance for probes in some areas are equal to that for them at the boundary for the same sample. The experimentally confirmed areas are larger than what the theory predicts. Our repeated experiments show that the areas out of the circle tangent to the boundary are suitable to Van der Pauw's method.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 2
    Digitale Medien
    Digitale Medien
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 3752-3756 
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: In this article, a new curve of the correction factor for the measurement of sheet resistance of a square sample with a square four-point probe is presented by using the theory of conformal transformation. This curve is quite different from that obtained by using the theory of infinite dipoles. An experimental curve is recommended to use. The function of the conformal transformation used in this article is simple and can be easily used for solving the problem of boundary effect of current field. The theoretical curve is suitable to the boundary areas of wafers.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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  • 3
    Digitale Medien
    Digitale Medien
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 22 (1994), S. 346-349 
    ISSN: 0142-2421
    Schlagwort(e): Chemistry ; Polymer and Materials Science
    Quelle: Wiley InterScience Backfile Collection 1832-2000
    Thema: Physik
    Notizen: The application of ellipsometry to study the SiOx/Si system subjected to hydrostatic pressures up to 1.8 GPa at temperatures up to 1280 °C is described. The theoretical model of defects as the spherical disturbances of material has been assumed. The ellipsometric parameters have been analysed as a function of defects size and density and compared with data obtained by etching and x-ray methods. The applicability of ellipsometry for near-surface defect structure analysis has been discussed.
    Zusätzliches Material: 4 Ill.
    Materialart: Digitale Medien
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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