Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
63 (1993), S. 1035-1037
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We report on the real-time in situ detection of SF6 in a plasma etching reactor with μTorr sensitivity using a tunable diode laser absorption spectrometer. The spectrometer employs combined wavelength and frequency modulation of the laser diode, an approach which allows for sensitive, interference fringe-free detection of the SF6. The dual modulation scheme also provides a feedback signal which enables the laser to be frequency locked to the absorption line.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.109826
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