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  • chemical vapour deposition  (2)
  • Industrial Chemistry and Chemical Engineering  (1)
  • polycarbosilane  (1)
  • 1
    Electronic Resource
    Electronic Resource
    Chemical vapour deposition of germanium-containing films by IR laser-induced decomposition of ethoxy(trimethyl)germane (1995)
    New York, NY [u.a.] : Wiley-Blackwell
    Applied Organometallic Chemistry 9 (1995), S. 667-673 
    Details
    ISSN: 0268-2605
    Keywords: chemical vapour deposition ; laserinduced decomposition ; organogermanium film ; ethoxy(trimethyl)germane ; Chemistry ; Organic Chemistry
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: Carbon Dioxide (CO2) laser-induced decomposition of ethoxy(trimethyl)germane (ETG) results in a substantial stripping of organic substituents from germanium and leads to deposition of organogermanium films, the composition of which is dependent on the mode of laser irradiation. Direct absorption of laser radiation in ETG affords material rich in Germanium, while a sulfur hexafluoride (SF6)-photosensitized process produces a deposit composed of Germanium, Carbon, Hydrogen and Oxygen. The deposited materials can be modified by chemical reactions with acetic anhydride and atmospheric moisture.
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/aoc.590090804
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Si/C phases from the IR laser-induced decomposition of divinylsilane (1998)
    New York, NY [u.a.] : Wiley-Blackwell
    Applied Organometallic Chemistry 12 (1998), S. 427-433 
    Details
    ISSN: 0268-2605
    Keywords: laser ; chemical vapour deposition ; thin films ; Si/C/H materials ; divinylsilane ; silicon carbide ; polycarbosilane ; Chemistry ; Industrial Chemistry and Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: Transversely excited atmospheric (TEA) CO2 laser-induced decomposition of divinylsilane in the gas phase yields unsaturated C2-C4 hydrocarbons, benzene and vinylsilane, and it represents a convenient process for chemical vapour deposition of thin solid films composed of silicon carbide and polycarbosilane. © 1998 John Wiley & Sons, Ltd.
    Additional Material: 8 Ill.
    Type of Medium: Electronic Resource
    Library Location Call Number Volume/Issue/Year Availability
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    Paper (German National Licenses)
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