ISSN:
0268-2605
Keywords:
chemical vapour deposition
;
laserinduced decomposition
;
organogermanium film
;
ethoxy(trimethyl)germane
;
Chemistry
;
Organic Chemistry
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
Carbon Dioxide (CO2) laser-induced decomposition of ethoxy(trimethyl)germane (ETG) results in a substantial stripping of organic substituents from germanium and leads to deposition of organogermanium films, the composition of which is dependent on the mode of laser irradiation. Direct absorption of laser radiation in ETG affords material rich in Germanium, while a sulfur hexafluoride (SF6)-photosensitized process produces a deposit composed of Germanium, Carbon, Hydrogen and Oxygen. The deposited materials can be modified by chemical reactions with acetic anhydride and atmospheric moisture.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/aoc.590090804
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