ISSN:
1572-8986
Keywords:
PA-CVD
;
pulsed DC discharge
;
TiN layers
;
emission spectroscopy
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract Investigations of the discharge for PA-CVD of TiN on steel substrates are carried out using optical emission spectroscopy. A great number of species could be identified in the discharge. The growth rate of dense layers shows a direct dependence on Ti+ intensities. The occurrence of TiN in the discharge leads to f aky, not compact layers, lowering the hardness of the layers.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01447172
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