ZIB

Hits per page

hit 1 - 1 | 1 hit

Select All Export

Electronic Resource

Spectroscopic investigation of the discharge for PA-CVD of TiN (1993)

Rie, K. -T. ; Gebauer, A. ; Wöhle, J.

Springer

Plasma chemistry and plasma processing 13 (1993), S. 93-101

add to mindlist on the mindlist

Details

ISSN: 1572-8986

Keywords: PA-CVD ; pulsed DC discharge ; TiN layers ; emission spectroscopy

Source: Springer Online Journal Archives 1860-2000

Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology

Notes: Abstract Investigations of the discharge for PA-CVD of TiN on steel substrates are carried out using optical emission spectroscopy. A great number of species could be identified in the discharge. The growth rate of dense layers shows a direct dependence on Ti+ intensities. The occurrence of TiN in the discharge leads to f aky, not compact layers, lowering the hardness of the layers.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF01447172

Library	Location	Call Number	Volume/Issue/Year	Availability

Others were also interested in ...

Paper (German National Licenses)

Fulltext

hit 1 - 1 | 1 hit