ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We have measured the thermal conductance, G, of (approximate)1 μm thick low stress silicon nitride membranes over the temperature range, 0.06〈T〈6 K, as a function of surface condition. For T〉4 K, G is independent of surface condition indicating that the thermal transport is determined by bulk scattering. For T〈4 K, scattering from membrane surfaces becomes significant. Membranes which have submicron sized Ag particles glued to the surface or are micromachined into narrow strips have a G that is reduced by a factor as large as 5 compared with that of clean, solid membranes with the same ratio of cross section to length. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.121269
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