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  • 1
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    The @journal of physical chemistry 〈Washington, DC〉 88 (1984), S. 5020-5025 
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology , Physics
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    The @journal of physical chemistry 〈Washington, DC〉 93 (1989), S. 5500-5507 
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology , Physics
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    The @journal of physical chemistry 〈Washington, DC〉 95 (1991), S. 2390-2394 
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology , Physics
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 7203-7206 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The optical emission spectrum in the spectral region 200–800 nm produced by electron impact on tetra-ethoxysilane (TEOS) under controlled single-collision conditions is analyzed. Absolute emission cross sections (at an impact energy of 100 eV) of 0.7±0.2×10−20 cm2 for the Si (3p4s 1P0→3p2 1S) line at 390.6 nm, 2.4±0.5×10−20 cm2 for the CH(A 2Δ→X 2Π) band centered around 430 nm, and cross sections below 0.5×10−20 cm2 for the hydrogen Balmer-α, -β, and -γ lines at, respectively, 656.4, 486.1, and 434.0 nm are measured. Comparatively high onset energies of 56.2±2.0 eV (Si) and 30.7±2.0 eV (CH) were found which when combined with the small cross sections indicate that the single-step dissociative excitation of TEOS by electron impact cannot be expected to play a major role in the collision processes that dominate the plasma chemistry of TEOS-containing processing plasmas.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 88 (1988), S. 4252-4256 
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: We studied the continuous emissions in the wavelength range 2000 to 3400 A(ring) produced by low energy electron impact on SF6 and NF3. In both cases two different features contribute to the emission spectrum. In NF3, we found a structured emission with maxima at 2880, 3005, and 3130 A(ring) and an onset energy of 8.5±2 eV superimposed on a continuous feature from 2500 to 3500 A(ring) with an onset at about 30 eV. We attribute the structured emission, which has an emission cross section of 2.2×10−19 cm2 at 25 eV, to the NF2 fragment. In SF6, we observed a broad emission feature from 2000 to 3300 A(ring) with maximum intensity at 3010 and 3145 A(ring) with a comparatively weak shoulder at 3160 A(ring). The 3160 A(ring) feature, which has an emission cross section of about 2×10−20 cm2 at 25 eV, has a single onset at 13.5±1.5 eV, whereas at least two different processes with onsets at 28±2 eV and 42±3 eV, respectively, contribute to the main SF6 emission. The potential relevance of these continuous emissions for diagnostic purposes of NF3 and SF6 processing plasmas utilizing plasma-induced emission spectroscopy and laser-induced fluorescence techniques is discussed.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 90 (1989), S. 4819-4825 
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: We analyzed the optical emissions in the wavelength region 2000–8000 A(ring) produced by dissociative electron impact on CCl2F2. Absolute photoemission cross sections have been determined for a variety of neutral and ionic fluorine and chlorine lines as well as for the strong diatomic CCl and CCl+ bands at 2778 and 2368 A(ring), respectively. In many cases comparisons between experimentally determined appearance potentials and spectroscopic and thermochemical data enabled a unique identification of the underlying break-up mechanism of the parent molecule upon electron impact. Atomic fluorine emissions which are the result of the total fragmentation of the parent molecule dominate the spectrum from 6000 to 8000 A(ring) with absolute emission cross sections in the range of 0.1 to 3.5×10−19 cm2 at 100 eV for individual 3p→3s fine structure lines. The prominent continuous emission between 2200 and 4000 A(ring) was found to consist of two contributions, the D 2B2→X 2B2 emission of the CCl2F+2 parent ion with an appearance potential of 14.2±1.0 eV and a second emission feature with an appearance potential around 42 eV which has not been uniquely identified.
    Type of Medium: Electronic Resource
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  • 7
    Electronic Resource
    Electronic Resource
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 94 (1991), S. 341-350 
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: We studied the emission of the fluorine (2p43s) 2,4P→(2p5) 2P resonance lines in the vacuum ultraviolet (VUV) at 95.5 and 97.5 nm, respectively, following dissociative excitation of SF6, CF4, NF3, and CCl2F2 by controlled electron impact under single collision conditions. Absolute photoemission cross sections and appearance potentials have been determined for the 95.5 nm 2P→2P multiplets for all four target gases. The apparent cross sections, which include cascade contribution from higher states, were measured to range from 2 to 5×10−18 cm2 at 200 eV impact energy. The cross sections were found to be heavily influenced by 3p→3s cascading with contributions ranging from 30% (SF6) to 75% (CF4). Subtraction of the cascade contributions yielded direct cross sections of 0.5× 10−18 cm2 (CF4), 1.4×10−18 cm2 (CCl2F2), 1.5×10−18 cm2 (SF6), and 2.9×10−18 cm2 (NF3) at 200 eV. The fluorine emissions are the result of the total fragmentation of the parent molecule for the targets SF6, CF4, and NF3. A much lower appearance potential and a different energy dependence of the cross section in the case of CCl2F2 indicates that partial fragmentation of this molecule plays a very important role. The findings for the 97.5 nm 4P→2P multiplet were essentially similar to those for the 2P→2P multiplet with the exception that accurate apparent emission cross sections could not be determined from a measurement of the 97.5 nm photon emission intensity. Due to their longer lifetime an appreciable fraction of the excited fluorine (2p43s) 4P atoms was found to drift out of the viewing area of our detection system before decaying radiatively. An attempt was made to extrapolate values for the 97.5 nm 4P→2P cross sections at 200 eV from a detailed analysis of the near-threshold region of the cross section for SF6, CF4, and NF3 This approach yielded FI 4P →2P cross sections comparable in magnitude to the FI 2P→2P cross sections.
    Type of Medium: Electronic Resource
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  • 8
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 63 (1988), S. 3673-3675 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Density fluctuations in heavy-fermion systems are discussed. Particular attention is paid to the hydrodynamic modes and it is pointed out how they differ from those of ordinary metals. A large Landau–Placzek ratio should help to make the quasiparticle diffusion mode observable. The role of the Coulomb interaction is discussed and it is shown that a low-lying optical plasmon should exist. The latter can be overdamped. It compliments the acoustic plasmon (or zero sound) mode into which the quasiparticle diffusion mode goes over for q values outside the hydrodynamic regime. In a recent experiment quasielastic light scattering due to density fluctuations has been observed in UPt3. Furthermore, it is shown that the attenuation mechanism of longitudinal ultrasound in heavy-fermion systems is very different from that of ordinary metals.
    Type of Medium: Electronic Resource
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  • 9
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 66 (1995), S. 2177-2179 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: This paper reports the successful design, fabrication, and testing of several side-cooled silicon and SiC (graphite) synchrotron mirrors (flat, spherical, and cylindrical) with a length of up to 1200 mm. The mirrors are equipped with support structures which allow the mirrors to be bent meridionally to cylinders with radii from infinity to 5000 m. Detailed metrology results are presented for the mirrors and the bending system. All mirrors will be installed at ESRF beamlines 8, 15, and 19. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 10
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    The @journal of physical chemistry 〈Washington, DC〉 99 (1995), S. 5986-5991 
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology , Physics
    Type of Medium: Electronic Resource
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