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  • 1
    Electronic Resource
    Electronic Resource
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 88 (1988), S. 4252-4256 
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: We studied the continuous emissions in the wavelength range 2000 to 3400 A(ring) produced by low energy electron impact on SF6 and NF3. In both cases two different features contribute to the emission spectrum. In NF3, we found a structured emission with maxima at 2880, 3005, and 3130 A(ring) and an onset energy of 8.5±2 eV superimposed on a continuous feature from 2500 to 3500 A(ring) with an onset at about 30 eV. We attribute the structured emission, which has an emission cross section of 2.2×10−19 cm2 at 25 eV, to the NF2 fragment. In SF6, we observed a broad emission feature from 2000 to 3300 A(ring) with maximum intensity at 3010 and 3145 A(ring) with a comparatively weak shoulder at 3160 A(ring). The 3160 A(ring) feature, which has an emission cross section of about 2×10−20 cm2 at 25 eV, has a single onset at 13.5±1.5 eV, whereas at least two different processes with onsets at 28±2 eV and 42±3 eV, respectively, contribute to the main SF6 emission. The potential relevance of these continuous emissions for diagnostic purposes of NF3 and SF6 processing plasmas utilizing plasma-induced emission spectroscopy and laser-induced fluorescence techniques is discussed.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 94 (1991), S. 341-350 
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: We studied the emission of the fluorine (2p43s) 2,4P→(2p5) 2P resonance lines in the vacuum ultraviolet (VUV) at 95.5 and 97.5 nm, respectively, following dissociative excitation of SF6, CF4, NF3, and CCl2F2 by controlled electron impact under single collision conditions. Absolute photoemission cross sections and appearance potentials have been determined for the 95.5 nm 2P→2P multiplets for all four target gases. The apparent cross sections, which include cascade contribution from higher states, were measured to range from 2 to 5×10−18 cm2 at 200 eV impact energy. The cross sections were found to be heavily influenced by 3p→3s cascading with contributions ranging from 30% (SF6) to 75% (CF4). Subtraction of the cascade contributions yielded direct cross sections of 0.5× 10−18 cm2 (CF4), 1.4×10−18 cm2 (CCl2F2), 1.5×10−18 cm2 (SF6), and 2.9×10−18 cm2 (NF3) at 200 eV. The fluorine emissions are the result of the total fragmentation of the parent molecule for the targets SF6, CF4, and NF3. A much lower appearance potential and a different energy dependence of the cross section in the case of CCl2F2 indicates that partial fragmentation of this molecule plays a very important role. The findings for the 97.5 nm 4P→2P multiplet were essentially similar to those for the 2P→2P multiplet with the exception that accurate apparent emission cross sections could not be determined from a measurement of the 97.5 nm photon emission intensity. Due to their longer lifetime an appreciable fraction of the excited fluorine (2p43s) 4P atoms was found to drift out of the viewing area of our detection system before decaying radiatively. An attempt was made to extrapolate values for the 97.5 nm 4P→2P cross sections at 200 eV from a detailed analysis of the near-threshold region of the cross section for SF6, CF4, and NF3 This approach yielded FI 4P →2P cross sections comparable in magnitude to the FI 2P→2P cross sections.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 97 (1992), S. 4111-4114 
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: Optical emission has been observed corresponding to vibrational bands in the NH (A 3Π→X 3Σ−) electronic transition during collisions of 5 eV, ground-state oxygen O(3P) atoms with MgF2 and Ni surfaces continuously exposed to a beam of hydrazine (N2H4). The NH emission intensity is observed to be about five times greater for MgF2 than for Ni. No dependence on temperature was observed for either surface in the range 240–340 K, implying that the NH-producing intermediate species is tightly bound. The half-lifetime for desorption of hydrazine from each surface was measured. This was found to be 120 min for the MgF2 surface at 240 K, and ≤20 min for Ni. After exposure the surface composition was measured using x-ray photoelectron spectroscopy (XPS) on the exposed and unexposed areas of both targets.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 64 (1993), S. 1754-1757 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A three-mesh gate is used in a time-of-flight (TOF) apparatus to analyze the velocity of positive ions. Test results and a theoretical description are presented of an effect arising from trapping ions between meshes of a two-gate TOF velocity analyzer. The entrapped ions produce a side peak in the TOF spectra corresponding to faster ions. The onset and relative height of the side peak is dependent on the gating voltage and risetime of the pulsing electronics, while the relative intensity depends upon the velocity being sampled and the ratio of the gate width to duration.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 64 (1993), S. 470-476 
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Theoretical considerations and test results are presented for a new-type velocity analyzer for incident fast neutral particles, positive ions, and negative ions. Velocity analysis is carried out by means of a pulsed, three-gate time-of-flight (TOF) technique capable of eliminating alias velocities (harmonics) to sixth order. In addition the design and operation are presented of a four-element ion lens system, with small spherical and chromatic aberrations, suitable for interfacing a large-diameter ion beam from the TOF section with a subsequent mass analyzer.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    Springer
    The European physical journal 9 (1988), S. 263-264 
    ISSN: 1434-6079
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract We measured the absolute photo-emission cross section of the BC ℓ A → X system around 2720 Å produced by electron-impact dissociation of BCℓ3. The cross section reaches a maximum around 40 eV with a value of 2.5±0.5 × 10−18 cm2. A double-onset structure with onsets around 14 eV and 26 eV indicates that the excited BCℓ fragments are produced via two different dissociation channels.
    Type of Medium: Electronic Resource
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