ZIB

Treffer pro Seite

Treffer 1 - 2 | 2 Treffer

Sortierung

Digitale Medien

Laser plasma x-ray sources for microlithography (1988)

Chaker, M. ; Pépin, H. ; Bareau, V. ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 63 (1988), S. 892-899

zur Merkliste hinzufügen auf der Merkliste

Details

ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: A plasma produced by laser irradiation of solid targets is a promising candidate as an efficient x-ray lithography source. In order to design a practical laser created x-ray source, it is necessary to study the factors affecting the x-ray emission. For this purpose, we investigate both theoretically and experimentally the influence of the laser target parameters on the x-ray emission in different spectral ranges for two laser wavelengths (λ=1.06 μm, λ=0.26 μm). From these results and considering mask transmission, resist sensitivities, and wafer throughput, we establish the characteristics of the laser required as an x-ray lithography source with performance acceptable for industrial applications.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.340031

Permalink

Bibliothek	Standort	Signatur	Band/Heft/Jahr	Verfügbarkeit

Andere fanden auch interessant ...

Artikel (Nationallizenzen)

Volltext

Digitale Medien

Calibrated soft x-ray spectroscopy using transmission grating, pinhole and film (1989)

Chaker, M. ; Bareau, V. ; Kieffer, J. C. ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 60 (1989), S. 3386-3390

zur Merkliste hinzufügen auf der Merkliste

Details

ISSN: 1089-7623

Quelle: AIP Digital Archive

Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik

Notizen: The combination of transmission diffraction grating (free-standing gold bars), pinhole and film can be used for quantitative measurements of the x-ray spectra in the 0.1–1.5-keV region by adopting the procedures described. The steps consist of film calibration and deconvolution of overlapping contributions from different spectral orders. In addition, spatial resolution is available in the direction perpendicular to the dispersion axis for each x-ray energy. The working example presented is the characterization of an x-ray source created by a laser-target interaction, for possible use in x-ray microscopy or x-ray lithography.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.1140534

Permalink

Bibliothek	Standort	Signatur	Band/Heft/Jahr	Verfügbarkeit

Andere fanden auch interessant ...

Artikel (Nationallizenzen)

Volltext

Treffer 1 - 2 | 2 Treffer