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  • 1
    Electronic Resource
    Electronic Resource
    Laser plasma x-ray sources for microlithography (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 63 (1988), S. 892-899 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A plasma produced by laser irradiation of solid targets is a promising candidate as an efficient x-ray lithography source. In order to design a practical laser created x-ray source, it is necessary to study the factors affecting the x-ray emission. For this purpose, we investigate both theoretically and experimentally the influence of the laser target parameters on the x-ray emission in different spectral ranges for two laser wavelengths (λ=1.06 μm, λ=0.26 μm). From these results and considering mask transmission, resist sensitivities, and wafer throughput, we establish the characteristics of the laser required as an x-ray lithography source with performance acceptable for industrial applications.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.340031
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Calibrated soft x-ray spectroscopy using transmission grating, pinhole and film (1989)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 60 (1989), S. 3386-3390 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The combination of transmission diffraction grating (free-standing gold bars), pinhole and film can be used for quantitative measurements of the x-ray spectra in the 0.1–1.5-keV region by adopting the procedures described. The steps consist of film calibration and deconvolution of overlapping contributions from different spectral orders. In addition, spatial resolution is available in the direction perpendicular to the dispersion axis for each x-ray energy. The working example presented is the characterization of an x-ray source created by a laser-target interaction, for possible use in x-ray microscopy or x-ray lithography.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1140534
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    Paper (German National Licenses)
    Fulltext
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