Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
67 (1995), S. 374-376
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The incorporation of nitrogen in oxides has been studied after furnace oxidation in N2O at 900 °C. We observe that nitrogen is removed from the oxide bulk during oxidation in N2O, while simultaneously nitrogen is incorporated at the growing Si–SiO2 interface. This results suggests that nitrogen incorporation involves a dynamic equilibrium between competing processes which causes both nitrogen incorporation and depletion. A chemical model for nitrogen removal is proposed based on a reaction with NO. Reaction energies, estimated from semiempirical quantum-mechanical calculations, support the proposed model. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.114633
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