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  • 1
    Electronic Resource
    Electronic Resource
    The use of metal/semiconductor structures to develop MULSAM analytical techniquesThis paper forms the text of an invited talk read at ECASIA 91, 14-18 October 1991, Budapest, Hungary. (1992)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 18 (1992), S. 295-302 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The structures that can be fabricated by integrated circuit technology are very useful as well-characterized samples for testing image processing methodologies in multi-imaging instruments. Such samples are employed in the work described in this paper to evaluate schemes for correction of spectral background, substrate backscattering, surface topography and beam current fluctuation effects out of Auger images. The outstanding problems associated with the effects on Auger image contrast of sharp edges bounding overlayer structures are outlined and possible solutions are discussed.
    Additional Material: 3 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740180502
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    Paper (German National Licenses)
    Fulltext
  • 2
    Electronic Resource
    Electronic Resource
    Topographical contrast using scatter diagrams and correlated images form four backscattered electron detectors (1991)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 17 (1991), S. 203-208 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The York multi-spectral Auger electron microscope has been used to examine the correlations between four images measured simultaneously by collecting energetic backscattered electrons (BSEs) with four quadrants of an Si p-n junction BSE detector. Digital signal processing of the four images reveals the topography expected of the polyhedra on the surface of an Ag-coated, anisotropically etched Si sample. Scatter diagrams formed form the pair of topographical images appear as distorted stereographic projections of the distribution of local surface normals. The use of such projections via models of the scattering process is proposed as a means of correcting topographical artifacts in Auger, EDX and other chemically specific images.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740170407
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    Internal scattering of electrons in a hemispherical spectrometer (1993)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 20 (1993), S. 891-900 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Seah and Smith have reported a method of measuring the peak-to-background ratio below the silver LMM Auger peak as a function of the pass energy of a hemispherical electron spectrometer. They used this measurement to reveal the extent of a contribution to the observed spectrum due to secondary electrons generated at the outer hemisphere near to its exit plane. This scattering is caused by electrons whose kinetic energies are just above those passing round the central trajectories of the spectrometer. The work reported here extends this method to a range of kinetic energies and reveals a varying contribution of the internal scattering to the shape of the measured spectrum across the energy span 50-2500 eV. This has an important effect upon attempts to measure the true shape of the background of a spectrum and the manner in which it depends, for example, upon the atomic number of the sample.Calibration methods are presented for the evaluation of the internal scattering of the spectrometer with the objective of finding ways to remove it from the measured spectrum. With the aid of electron optical modelling, the origin of the internal scattering is attributed both to electrons with energies just above those passed by the spectrometer that strike the outer hemisphere and to very energetic electrons leaving the sample and striking surfaces inside the transfer lens between the sample and the hemispheres. These methods are applied to a number of spectra of pure elements to demonstrate the efficacy of the procedure.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740201104
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    Paper (German National Licenses)
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  • 4
    Electronic Resource
    Electronic Resource
    Automatic removal of substrate backscattering effects in Auger imaging and spectroscopy (1993)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 20 (1993), S. 984-990 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The York multi-spectral scanning Auger microscope has been used to investigate the correlations between Auger and backscattered electron images collected simultaneously from a electron spectrometer and the quadrants of a Sip-n junction backscattered electron detector. Digital signal processing of the four backscattered electron signals allows the calculation of the Auger backscattering factor at each pixel position, the division of which into the Auger image allows the removal of contrast due to subsurface composition variations. The method, which allows the quantification of complicated heterogeneous samples, requires no fitting parameters or prior knowledge regarding the sample.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740201209
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    Paper (German National Licenses)
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  • 5
    Electronic Resource
    Electronic Resource
    A third-generation Auger microscope using parallel multispectral data acquisition and analysis (1991)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 17 (1991), S. 71-84 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The Design and construction of an ultrahigh vacuum multi-imaging scanning electron microscope is described. The microscope is designed to contain two field electron emission columns and can acquire simultaneous digital images from a 16-channel electron spectrometer, a four-quadrant back-scattered electron (BSE) detector, an Si(Li) x-ray detector, a SEM detector and the current flowing to ground through the sample. Because there is exact spatial registration between corresponding pixels in each of the images, it is possible to use the image set to make quantitative interpretations of the surface and subsurface chemistry. This is done using mathematical manipulations of the image set, together with models for the SEM, BSE and Auger signals. Techniques are described for setting up the alignment and characterizing the field of view and transmission function of the microscope and its spectrometer. Examples of multi-imaging from simple samples are given. The close coupling between the microscope and its control and interpretation computers provides considerable power for the analysis of inhomogeneous surfaces.
    Additional Material: 16 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740170203
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    Paper (German National Licenses)
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  • 6
    Electronic Resource
    Electronic Resource
    Image correlation: Application to correction of beam current fluctuations in quantitative surface microscopyPaper presented at the Quantitative Surface Analysis (QSA 6) Conference, London, 13-16 November 1990. (1991)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 17 (1991), S. 209-212 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The York multi-spectral Auger microscope has been used to demonstrate the use of the anticorrelation between a SEM and a sample current image fluctuations. Such fluctuations may be important when using very bright electron sources or when collecting image data over long periods of time.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740170408
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    Paper (German National Licenses)
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  • 7
    Electronic Resource
    Electronic Resource
    A study of the chemical composition of some cobalt silicide layer structures (1993)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 20 (1993), S. 524-530 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Auger and loss spectra and images have been obtained from a CoSi2 standard and a structure containing cobalt-silicon films between a Co surface layer and a silicon substrate. The results from a Phi 590 spectrometer and the York MULSAM instrument have been compared. Quantitative analysis of the compositions of both samples has shown that elements can be used as standards along with well-established matrix correction procedures. However, the effects of preferential sputtering in conventional depth profiling or bevel sectioning with ions lead to a complex composition distribution that is depleted in Si at the surface. The plasmon loss below the Co LVV Auger peak is enhanced in height near to the Si/silicide interface. The layer structure appears to be close to Co/Co2Si/CoSi/Si.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740200607
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    Paper (German National Licenses)
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