ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The characterization of Ni/Au/Te and Au/Te contacts on n-GaAs by Auger electron spectroscopy is studied by surface element mapping and depth profiling. Owing to the high lateral resolution of AES, important characteristics of these metallization schemes, which could not be detected by any other technique, are revealed. Comparison with other analysis technique is performed, yielding important insight into the mechanism of ohmic conductivity.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740190160
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