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  • 1
    Electronic Resource
    Electronic Resource
    The Characteristic of Abrasive Particle in Chemical – Mechanical Polishing (2006)
    s.l. ; Stafa-Zurich, Switzerland
    Materials science forum Vol. 505-507 (Jan. 2006), p. 805-810 
    Details
    ISSN: 1662-9752
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Chemical Mechanical Polishing (CMP) is the key technique for wafer global planarization. However, the characteristic of abrasive particle, including particle size and grain/grain collision elasticity, plays an important role in CMP process. This investigation analyzes the slurry flow between the wafer and pad using a grain flow model with partial hydrodynamic lubrication theory. This model predicts the film thickness and remove rate of the slurry flow under a variety of the CMPparameters including load, rotation speed, pad roughness, grain/grain collision elasticity and grain size. The theoretical results compare well with the previous experiment data. This study elucidates the grain characteristics during CMP process. It also contributes to the understanding of abrasive particleeffects in the chemical mechanical polishing mechanism
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/02/12/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.505-507.805.pdf
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  • 2
    Electronic Resource
    Electronic Resource
    A Study of Testing the Nanocatalyst Decomposition Efficiency of Methanol (CH〈sub〉3〈/sub〉OH) and Ethanol (C〈sub〉2〈/sub〉H〈sub〉6〈/sub〉O) (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Materials science forum Vol. 561-565 (Oct. 2007), p. 1417-1420 
    Details
    ISSN: 1662-9752
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: This research carries out an inexpensive, rapid and novel exercise, which is applied toperform the photocatalyst decomposition effectiveness of Methanol and Ethanol in gaseous form.The major devices of this applicable measurement developed by this practice are only utilizingultraviolet-visible spectrophotometer and quartz cuvette, and the experimental procedures arestraightforward and speedy. In the conduct experiments, Methanol and Ethanol with a specificconcentration is initially injected into an enclosed quartz cuvette. Then the cuvette is put inultraviolet- visible spectrophotometer to measure the Methanol and Ethanol concentration, so as toobtain an unique UV absorbance spectrum at its particular concentration. In the conductexperiments of measuring photocatalyst decomposition efficiency, the self-made (SANSS)nanocatalyst TiO2 is initially coated in the quartz plate, and put into the quartz. Then a specificconcentration of methanol alcohol and ethanol is injected into the quartz cuvette under the UVirradiation exposure, so as to carry out photodecomposition of Methanol and Ethanol experiment.After that, the cuvettes are then put into the ultraviolet-visible spectrophotometer for measuring theabsorbance intensity of UV spectrums in order to produce degradation chart. The preliminaryresults point out that the self-made nanocatalyst TiO2 has exceptionally outstanding decompositionefficiency which further points out the fact that, when UV irradiation for 60minutes, the gaseousMethanol can be reduced to 3.8% of the original sample, and the gaseous Ethanol can be reduced to6% of the original sample. But when exercising with commercial nanocatalyst TiO2 to undergo thesame process exactly under the same circumstances, the residue gaseous concentration can only bereduced to 17% and 16% of the gaseous Methanol and Ethanol original sample
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/02/18/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.561-565.1417.pdf
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    Effect of Water Chemical Corrosion on Strength and Cracking Characteristics of Rocks - A Review (2004)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 261-263 (Apr. 2004), p. 1355-1360 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Study of effect of water chemistry corrosion on strength and cracking characters of rocks is an important aspect to improve long-term stability of rock engineering and increase efficiency of geothermal and petroleum developing. This paper reviews new progress of study on this topic. It includes effect of water chemical corrosion on triaxial compressive strength, uniaxial compressive strength, shear strength, tensile strength, and cracking characteristics of rocks. The mechanism of water chemical corrosion is analyzed. The further study on this topic is also discussed
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/47/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.261-263.1355.pdf
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  • 4
    Electronic Resource
    Electronic Resource
    Photocatalytic and UV Characterization of TiO〈sub〉2〈/sub〉 Nanofluid Prepared by SANSS on HVAC (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 364-366 (Dec. 2007), p. 937-941 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: This study develops a measurement method for testing the efficiency of photocatalysts inthe degradation of NH3 gaseous concentrations. The catalysts used in this study are the same asthose used previously in our UV/VIS spectrophotometer. Reaction measurements were carried outat 27°C and 17°C under ambient pressure on Heat Ventilating and Air Conditioning (HVAC)system. Quartz plates were coated with TiO2 nanocatalyst. Then the plate was put in the stablereaction cell under different flow rates of circulation. The experiment gives a direct and simplemeasurement of ammonia flux and hence of overall ammonia emission rate. The results reveal thatthe Submerged Arc Nanoparticle Synthesis System (SANSS) TiO2 nanocatalyst has excellentdegradation efficiency towards NH3, so that when it is exposed to UV irradiation for 60 minutes, thegaseous concentration can be reduced to 10% of the original concentration. In addition, the rateconstant of the degradation reaction of the self-made TiO2 nanocatalyst towards NH3 is as high as0.039min-1
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.937.pdf
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    Paper (German National Licenses)
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  • 5
    Electronic Resource
    Electronic Resource
    Research of Vacuum Pump with Nano-Lubricant (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 364-366 (Dec. 2007), p. 867-872 
    Details
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: This study used the Al2O3 nano-lubricant produced from the direct synthesis method wasused as the experimental samples and the ultrasonic vibration was used for dispersing thenanoparticles into three types of the weight fraction (0.1, 0.2, 0.3%wt). The base solvent was thelubricant of vacuum pump. The objectives of this study were to discuss the dependence of operatingtemperature of vacuum pump under the various weight fraction of Al2O3 nanoparticles. In thisexperiment we added Al2O3 nano-lubricant into the direct drive oil sealed rotary vacuum pump, andused the thermocouple measure the temperature on the four test points (cylinder, in-lubricant, caseof vacuum pump and discharge pipeline). The results show that the cylinder temperature wasreduced by 1.3% and increased by 0.4%, 1.8%, the lubricant temperature was increased by 5.3%,0.5% and 1.9%, the case surface temperature was reduced by 1.7%, 1.4% and 1.5%, and dischargepipeline temperature was reduced by 0.6%, 2.1% and 3.8% respectively when the sample fractionswere 0.1%, 0.2% and 0.3%wt. From the results, it could be realized that the nano-lubricant hasmore effects on increasing the performance of heat sink than conventional lubricant
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.867.pdf
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